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Pulsed hybrid reactive magnetron sputtering for high zT Cu2Se thermoelectric films

Thermoelectric films on flexible substrates are of interest for the integration of thermoelectric in wearable devices. In this work, copper selenide films are achieved by a novel low-temperature technique, namely pulsed hybrid reactive magnetron sputtering (PHRMS). A brief introduction to the basic...

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Autor Principal: Pérez Taborda, Jaime Andrés; Vera Londoño, Liliana Patricia; Caballero Calero, Olga; López, Elvis O.; Romero, Juan J.; Stroppa, Daniel G.; Briones, Fernando; Martín González, Marisol
Formato: Artículo (Article)
Lenguaje:Desconocido (Unknown)
Publicado: Advanced Materials Technologies; Vol. 2, No. 7 2017
Materias:
Copper selenide; Cross-plane thermal conductivity; Flexible Cu2Se; New pulse controlled reactive magnetron sputtering; PHRMS; Thermoelectric properties; Thin films
Ciencias naturales y matemáticas; Ciencias naturales y matemáticas / Física
Acceso en línea:http://babel.banrepcultural.org/cdm/ref/collection/p17054coll23/id/923
id ir-p17054coll23-923
recordtype dspace
spelling ir-p17054coll23-9232020-09-28 Pulsed hybrid reactive magnetron sputtering for high zT Cu2Se thermoelectric films Pérez Taborda, Jaime Andrés; Vera Londoño, Liliana Patricia; Caballero Calero, Olga; López, Elvis O.; Romero, Juan J.; Stroppa, Daniel G.; Briones, Fernando; Martín González, Marisol Thermoelectric films on flexible substrates are of interest for the integration of thermoelectric in wearable devices. In this work, copper selenide films are achieved by a novel low-temperature technique, namely pulsed hybrid reactive magnetron sputtering (PHRMS). A brief introduction to the basic chemistry and physics involved during growth is included to explain its fundamentals. PHRMS is a single-step, room temperature (RT), fabrication process carried out in another ways conventional vacuum sputtering system. It does not require high-temperature post-annealing to obtain films with great thermoelectric performance. It is, therefore, compatible with polymeric substrates like Kapton tape. Several sets of films covering a large exploratory compositional range (from Cu/Se = 1 to 9) are deposited and their microstructure and thermoelectric properties are analyzed at RT. Power factors as high as 1.1 mW m?1 K?2 in the in-plane direction and thermal conductivities as low as ? = 0.8 ± 0.1 W m?1 K?1 in the out-of-plane direction have been obtained for ?-Cu2Se films. Consequently, a figure of merit of 0.4 at RT can be estimated under the assumption that for this polycrystalline cubic phase no additional anisotropy in the thermoelectric properties is introduced by the planar configuration. Moreover, PHRMS is also industrially scalable and compatible with the in-line fabrication of other selenides. Copper selenide; Cross-plane thermal conductivity; Flexible Cu2Se; New pulse controlled reactive magnetron sputtering; PHRMS; Thermoelectric properties; Thin films Ciencias naturales y matemáticas; Ciencias naturales y matemáticas / Física 2017 Advanced Materials Technologies; Vol. 2, No. 7 PDF Artículo ENG - Inglés Colfuturo © Derechos reservados del autor http://babel.banrepcultural.org/cdm/ref/collection/p17054coll23/id/923
institution Biblioteca Virtual Banco de la República - Colecciones digitales
collection Custom
language Desconocido (Unknown)
topic Copper selenide; Cross-plane thermal conductivity; Flexible Cu2Se; New pulse controlled reactive magnetron sputtering; PHRMS; Thermoelectric properties; Thin films
Ciencias naturales y matemáticas; Ciencias naturales y matemáticas / Física
spellingShingle Copper selenide; Cross-plane thermal conductivity; Flexible Cu2Se; New pulse controlled reactive magnetron sputtering; PHRMS; Thermoelectric properties; Thin films
Ciencias naturales y matemáticas; Ciencias naturales y matemáticas / Física
Pérez Taborda, Jaime Andrés; Vera Londoño, Liliana Patricia; Caballero Calero, Olga; López, Elvis O.; Romero, Juan J.; Stroppa, Daniel G.; Briones, Fernando; Martín González, Marisol
Pulsed hybrid reactive magnetron sputtering for high zT Cu2Se thermoelectric films
description Thermoelectric films on flexible substrates are of interest for the integration of thermoelectric in wearable devices. In this work, copper selenide films are achieved by a novel low-temperature technique, namely pulsed hybrid reactive magnetron sputtering (PHRMS). A brief introduction to the basic chemistry and physics involved during growth is included to explain its fundamentals. PHRMS is a single-step, room temperature (RT), fabrication process carried out in another ways conventional vacuum sputtering system. It does not require high-temperature post-annealing to obtain films with great thermoelectric performance. It is, therefore, compatible with polymeric substrates like Kapton tape. Several sets of films covering a large exploratory compositional range (from Cu/Se = 1 to 9) are deposited and their microstructure and thermoelectric properties are analyzed at RT. Power factors as high as 1.1 mW m?1 K?2 in the in-plane direction and thermal conductivities as low as ? = 0.8 ± 0.1 W m?1 K?1 in the out-of-plane direction have been obtained for ?-Cu2Se films. Consequently, a figure of merit of 0.4 at RT can be estimated under the assumption that for this polycrystalline cubic phase no additional anisotropy in the thermoelectric properties is introduced by the planar configuration. Moreover, PHRMS is also industrially scalable and compatible with the in-line fabrication of other selenides.
format Artículo (Article)
author Pérez Taborda, Jaime Andrés; Vera Londoño, Liliana Patricia; Caballero Calero, Olga; López, Elvis O.; Romero, Juan J.; Stroppa, Daniel G.; Briones, Fernando; Martín González, Marisol
author_facet Pérez Taborda, Jaime Andrés; Vera Londoño, Liliana Patricia; Caballero Calero, Olga; López, Elvis O.; Romero, Juan J.; Stroppa, Daniel G.; Briones, Fernando; Martín González, Marisol
author_sort Pérez Taborda, Jaime Andrés; Vera Londoño, Liliana Patricia; Caballero Calero, Olga; López, Elvis O.; Romero, Juan J.; Stroppa, Daniel G.; Briones, Fernando; Martín González, Marisol
title Pulsed hybrid reactive magnetron sputtering for high zT Cu2Se thermoelectric films
title_short Pulsed hybrid reactive magnetron sputtering for high zT Cu2Se thermoelectric films
title_full Pulsed hybrid reactive magnetron sputtering for high zT Cu2Se thermoelectric films
title_fullStr Pulsed hybrid reactive magnetron sputtering for high zT Cu2Se thermoelectric films
title_full_unstemmed Pulsed hybrid reactive magnetron sputtering for high zT Cu2Se thermoelectric films
title_sort pulsed hybrid reactive magnetron sputtering for high zt cu2se thermoelectric films
publisher Advanced Materials Technologies; Vol. 2, No. 7
publishDate 2017
url http://babel.banrepcultural.org/cdm/ref/collection/p17054coll23/id/923
_version_ 1682460108738527232
score 12,131701

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