Deposition pressure effect on chemical, morphological and optical properties of binary Al-nitrides structural and optical properties of compounds (AIN, GaN, InN)

Aluminum nitride films (AlN) were produced by Nd:YAG pulsed laser (PLD), with repetition rate of 10 Hz. The laser interaction on Al target under nitrogen gas atmosphere generates plasma which is produced at room temperature with variation in the pressure work from 0.39 Pa to 1.5 Pa thus producing di...

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Detalles Bibliográficos
Autor Principal: Pérez Taborda, Jaime Andrés; Caicedo, J. C.; Grisales, M.; Riascos Landázury, Henry; Saldarriaga, W.
Formato: Artículo (Article)
Lenguaje:Desconocido (Unknown)
Publicado: Optics & Laser Technology; Vol. 69 2015
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