Determination of physical response in (Mo/ALN) saw devices
This paper describes the experimental conditions in surface acoustic wave (SAW) designed on aluminum nitride (AlN) films grown on Si3 N 4 substrates by using pulsed laser deposition. Moreover it was studied the dependency of optical properties with temperature of deposition. The thickness, measured...
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| Formato: | Artículo (Article) |
| Lenguaje: | Desconocido (Unknown) |
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Surface Review and Letters, Vol. 20, No. 2
2013
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| Acceso en línea: | http://babel.banrepcultural.org/cdm/ref/collection/p17054coll23/id/504 |