Determination of physical response in (Mo/ALN) saw devices

This paper describes the experimental conditions in surface acoustic wave (SAW) designed on aluminum nitride (AlN) films grown on Si3 N 4 substrates by using pulsed laser deposition. Moreover it was studied the dependency of optical properties with temperature of deposition. The thickness, measured...

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Detalles Bibliográficos
Autor Principal: Pérez Taborda, Jaime Andrés; Caicedo, H.; Caicedo, J. C.; Riascos Landázury, Henry
Formato: Artículo (Article)
Lenguaje:Desconocido (Unknown)
Publicado: Surface Review and Letters, Vol. 20, No. 2 2013
Acceso en línea: